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Design, manufacture and process
development of large size in-line
.....magnetron
sputter to replace electroplated
coating process, which
.....causes
pollution. |
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Development of batch type vacuum
coating system using arc source
.....and
magnetron source
Development of Non-pollution high
rate vacuum coating unit and
.....process
for cylinder and pipe inside coating |
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Development and localization of
conductive ceramic coating tray
for
.... replacing
complex extrusion tray, which
prevents the surface
.....static
electricity for semi-conductor
IC packaging
Design and manufacture of cryosorption
panel, high vacuum pump
.....and.large
Vacuum Chamber for Neutral Beam
Injection in the heating
.....unit
of.nuclear
fusion test reactor |
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Design and manufacture of Interface
Components, a beam drawing
.....tester,
to be installed between Ion Source
and Neutral Beam Injection
.....Chamber
of Nuclear Fusion Test reactor |
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Design and manufacture of round
drawer type ion source accelerator,
.....which
accelerate ion beam generated
by ion source of nuclear }
.....fusion
test reactor
Development of magnetron sputtering
system for 14inch glass coating
Development of Multi-Source Magnetron
Sputtering System |
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Engineering design of KSTAR PFC
(Plasma Facing Components)
.....and
prototype manufacture of inboard
limiter in PFC
Design and manufacture of ion
beam neutralizer for nuclear fusion
.....test
reactor
Development and prototype manufacture
of flexible thermal shield to
.....maintain
the super conductive cable at
lowest temperature
Development of batch type PVD
system for installing 4 sets of
high
.....efficiency
large area rectangular magnetron
source |
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Research and development of manufacturing
technology for welding
.....type
large aluminium vacuum chamber
Development of batch type PVD
equipment for installing 6 sets
of
.....high
efficiency 4" round magnetron
source
Prototype Manufacture of thermal
shield to maintain Tokamak
.....vacuum
chamber at lowest temperature
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