|
|
|
|
The
PVD coating system
for mass production
using the round
arc source and
large area rectangular
arc source.
This system can
be converted into
hybrid coating
system by install
the additional
magnetron sources,
and it is used
for wear resistant
coatings for such
as different cutting
tools, punch,
mold and machine
parts. |
|
|
|
|
|
|
The
high rate in-line
magnetron sputtering
system for a replacement
for electroplated
coating with 6
large area rectangular
sources.
It is consisted
of four chambers
for loading, plasma
cleaning, coating
and unloading.
Automatic gas
controller is
installed and
full automatic
operation is available
by means of PLC.
|
|
|
|
|
|
|
The
R&D system
that can be installed
4 magnetron sources.
Jig's revolution
and rotation is
possible, and
pneumatic target
shutter and gas
controller is
installed.
It is used for
the property analysis
and evaluation
of the magnetron
profile as well
as development
of reactive magnetron
sputtering process
and multi-layer
thin film. |
|
|
|
|
|
|
The
magnetron sputtering
system that has
one large area
rectangular magnetron
source and automatic
reciprocating
jig.
It is used for
development of
reactive magnetron
sputtering process,
new magnetron
source and advanced
functional metalization
process. |
|
|
|
|
|
|
The
magnetron sputtering
system that can
be install 4 external
sources on the
chamber side and
2 internal sources
on the top.
Automatic operation
is available by
means of auto-gas
controller, pneumatic
target shutter
and PLC. It is
used for development
of Multi-layer
thin film and
reactive magnetron
sputtering process.
|
|
|